Stock material or miscellaneous articles – Composite – Of silicon containing
Patent
1984-01-20
1986-12-09
Terapane, John F.
Stock material or miscellaneous articles
Composite
Of silicon containing
427 93, 427 34, 427 96, B32B 904, B05D 512, B05D 100
Patent
active
046280065
ABSTRACT:
Passivation of a hybrid microelectronic device is achieved by plasma polyization of hexamethyldisilazane on the device surface. A moisture impermeable thin film layer is deposited which protects the moisture sensitive components from corrosion. The layer is readily removable, however, in order to effect repairs to the device when necessary.
REFERENCES:
patent: 3297465 (1967-01-01), Connell et al.
patent: 4349609 (1982-09-01), Takeda et al.
patent: 4395460 (1983-07-01), Gaul
Rathbun Bonnie L.
Schuessler Philipp W. H.
Beers Robert F.
Hansen Henry
Pace Vincent T.
Terapane John F.
The United States of America as represented by the Secretary of
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