Particulate inspection of fluids using interferometric light mea

Details Particulate inspection of fluids using interferometric light mea Particulate inspection of fluids using interferometric light mea

1988-04-22

1991-10-29

Turner, Samuel

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, 356353, G01B 902

Patent

active

050610708

ABSTRACT:
A method and apparatus for monitoring process fluids used in the manufacture of semiconductor components and other microelectronic devices relies upon detection of the phase shift of a pair of optical energy beams encountering a bubble or particle in the fluid. The system distinguishes between bubbles and particles having indices of refraction greater than the surrounding fluid and between different types and sizes of particles.

REFERENCES:
patent: 2679183 (1954-05-01), Buchele et al.
patent: 3662176 (1972-05-01), Kametsky et al.
patent: 3732014 (1973-05-01), Uzgiris
patent: 3796495 (1974-03-01), Laub
patent: 4329054 (1982-05-01), Bachalo
patent: 4477187 (1984-10-01), Pettit et al.
patent: 4577964 (1986-03-01), Hansen, Jr.

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