Particle-optical instrument comprising a deflection unit for sec

Details Particle-optical instrument comprising a deflection unit for sec Particle-optical instrument comprising a deflection unit for sec

1995-03-15

1996-04-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3728, H01J 37244

Patent

active

055106170

ABSTRACT:
A primary beam in a scanning electron microscope (SEM) releases secondary electrons in the specimen to be studied. These electrons move back to the focusing lens against the direction of the primary beam, detection of these electrons taking place in the vicinity of said lens. A known detector comprises a Wien filter for deflecting the electrons from the optical axis to the actual detector. In accordance with the invention a SEM detector is provided with a double electric dipole. The latter leaves the primary beam undisturbed to a high degree, but very efficiently deflects the secondary electrons to the actual detector.

REFERENCES:
patent: 4442355 (1984-04-01), Tamura et al.
patent: 4823005 (1989-04-01), Garth
J. Zach & H. Rose, "Efficient Detection of Secondary Electrons in Low-Voltage Scanning Electron Microscopy", Scanning, vol. 8, Aug. 29, 1986, pp. 285-293.

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