Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2006-08-15
2006-08-15
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S440110
Reexamination Certificate
active
07091497
ABSTRACT:
The invention provides a particle-optical device for irradiating an object with a beam of particles. The device comprises a housing in which are located positioning means1for positioning the object within the housing. The positioning means comprise a reference body2supported against a supporting portion of the housing and a kinematic system—which can be manipulated—with an object carrier9for manipulating the object held in the object carrier in at least one degree of freedom with respect to the reference body2, the device further comprising control means and at least one combination23,30of a piezo-electric position actuator25and a piezo-electric force sensor35, which actuator and sensor are positioned in series, whereby the control means—in dependence upon at least one input signal from at least one sensor—generates a control signal for at least that actuator associated with said sensor, characterized in that the series-positioned actuators and sensors of said at least one combination are positioned between the housing and the reference body, the support of the reference body against the supporting portion of the housing occurring via said at least one combination.
REFERENCES:
patent: 4585969 (1986-04-01), Tanaka
patent: 4928030 (1990-05-01), Culp
patent: 5237236 (1993-08-01), Culp
patent: 5465021 (1995-11-01), Visscher et al.
patent: 5939816 (1999-08-01), Culp
patent: 6154000 (2000-11-01), Rastegar et al.
patent: 6504669 (2003-01-01), Janz et al.
patent: 6522388 (2003-02-01), Takahashi et al.
patent: 6768124 (2004-07-01), Suzuki et al.
patent: 6791664 (2004-09-01), Auer et al.
FEI Company
Hilgers, Bell & Richards LLP
Quash Anthony
Scheinberg Michael O.
Stellitano Patrick
LandOfFree
Particle-optical device for irradiating an object does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Particle-optical device for irradiating an object, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Particle-optical device for irradiating an object will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3675761