Particle-optical arrangements and particle-optical systems

Details Particle-optical arrangements and particle-optical systems Particle-optical arrangements and particle-optical systems

2006-04-04

2006-04-04

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S3960ML

Reexamination Certificate

active

07022987

ABSTRACT:
There are disclosed particle-optical beam splitters providing at least three beam-manipulating regions having magnetic fields of different field strengths provided therein for at least one particle beam passing the beam splitter. The beam splitter is, in first order, free of dispersion, astigmatism and distortion.

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