Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1995-04-10
1996-11-26
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250309, H01J 3714, H01J 37244
Patent
active
055788220
ABSTRACT:
The focusing device 8 for the primary beam in a scanning electron microscope (SEM) consists in known manner of a combination of a magnetic gap lens 34 and a monopole lens 38. The secondary electrons released from the specimen are detected in accordance with the invention by a detector whose deflection unit 52, or the actual detector 64, 66, is arranged in a field-free space between the gap lens and the monopole lens. This space is rendered field-free by a screening plate 44 arranged underneath the gap lens. In order to achieve a high detector efficiency and a large field of vision, the pole tip of the focusing device 8 is provided with an attraction electrode 42 whose potential is higher than that of the specimen.
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Henstra Alexander
Kruit Pieter
Troost Kars Z.
Van der Mast Karel D.
Anderson Bruce C.
Eason Leroy
U.S. Philips Corporation
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