Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1997-06-16
2000-01-04
Rosenberger, Richard A.
Optics: measuring and testing
By particle light scattering
With photocell detection
G01N 2185
Patent
active
060116226
ABSTRACT:
An improved particle monitoring sensor is described which uses a variety of techniques to prolong the effective life of the optical surfaces within the particle monitoring'sensor. Substantially inert purging gas is directed over the particle monitoring sensor windows, which are normally exposed to a harsh operating environment. The surfaces of these windows are heated by heating elements in direct thermal contact with the windows. In addition, a restrictive slit is placed over the detector window to reduce the exposed area and to increase the velocity of gas flowing over the window surface. While this slit reduces the detector's field of view, the signal loss is reduced by using a linearly polarized light source and aligning the elongated slit's major axis with the direction of polarization.
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Fishkin Boris
Salzman Phil
Applied Materials Inc.
Patterson Thomason Moser
Rosenberger Richard A.
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