Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1995-06-06
1996-10-15
Rosenberger, Richard A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356246, G01N 2103
Patent
active
055659853
ABSTRACT:
An improved particle monitoring sensor is described which uses a variety of techniques to prolong the effective life of the optical surfaces within the particle monitoring sensor. Substantially inert purging gas is directed over the particle monitoring sensor windows, which are normally exposed to a harsh operating environment. The surfaces of these windows are heated by heating elements in direct thermal contact with the windows. In addition, a restrictive slit is placed over the detector window to reduce the exposed area and to increase the velocity of gas flowing over the window surface. While this slit reduces the detector's field of view, the signal loss is reduced by using a linearly polarized light source and aligning the elongated slit's major axis with the direction of polarization.
REFERENCES:
patent: 416327 (1889-12-01), Durkee
patent: 3495259 (1970-02-01), Rocholl et al.
patent: 3901602 (1975-08-01), Gravatt, Jr.
patent: 4355861 (1982-10-01), Sebald
patent: 4827143 (1989-05-01), Munakata et al.
patent: 5083865 (1992-01-01), Kinney et al.
B. Fishkin, "In Situ Particle Monitoring Benefits in Tungsten Applications." Ultraclean Manufacturing Conference 93, p. 75.
L. Peters, "20 Good Reasons to Use In Situ Particle Monitors", Semiconductor International, pp. 52-57.
S. Gonzales, et al., "Particle Reduction Techniques and Performance Utilization on the AMAT Endura 5500 PVD System", Microcontamination Conference Proceedings, pp. 14-22.
D. Greenstin, et. al., "Investigating a Prototype in Situ Particle Monitor on the Exhaust Line of a CVD Reactor", Microcontamination (Mar. 1991), pp. 21-26.
TSI Incorporated, "Vacuum Particle Detector Models 7320 and 7340", TSI (Product Information Brochure).
High Yield Technology, Inc., "Model 30 Sensor", (Product Information Brochure).
High Yield Technology, Inc., "Model 20S Sensor", (Product Data Sheet).
Fishkin Boris
Salzman Phil
Applied Materials Inc.
Berman Rod S.
Gerardi Michael M.
Kwong Raymond
Rosenberger Richard A.
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