Particle measuring device having funnel-shaped collector for sem

Details Particle measuring device having funnel-shaped collector for sem Particle measuring device having funnel-shaped collector for sem

1997-08-18

2000-07-04

Brock, Michael

Measuring and testing

Gas analysis

Solid content of gas

7386321, G01N 1506, G01N 124

Patent

active

060821795

ABSTRACT:
A particle measurer used in a semiconductor clean room includes a funnel-shaped collector for facilitating the measurement of a particle level of an air sample in the clean room. The particle measurer is arranged so that a narrow end part of the funnel-shaped collector is connected to an intake of the particle measurer. A wide end of the funnel-shaped connector receives the air sample through a sample air pipe. A pump is used for suctioning the air sample through the intake of said particle counter and for discharging the air sample through an exhaust.

REFERENCES:
patent: 3070990 (1963-01-01), Krinov
patent: 3759617 (1973-09-01), Barringer
patent: 3780567 (1973-12-01), Ovard
patent: 4137751 (1979-02-01), Rhodes et al.

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