Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-02-15
2005-02-15
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S398000, C250S298000, C250S305000, C250S311000, C250S310000, C313S359100
Reexamination Certificate
active
06855939
ABSTRACT:
The invention relates to a particle beam system comprising a particle source (1), a mirror corrector (9, 21to25), and an objective lens (16). The mirror corrector comprises an electrostatic mirror (9) and a magnetic beam deflector (21, 22, 23, 24, 25), which is arranged between the particle source (1) and the electrostatic mirror (9) as well as between the electrostatic mirror (9) and the objective lens (16). The magnetic beam deflector (21, 22, 23, 24, 25) is free from dispersion for each single pass. The magnetic beam deflector (21, 22, 23, 24, 25) also comprises quadrupoles and/or quadrupole components, which are provided in such a manner that a maximum of two planes, which are conjugated with regard to the diffraction plane (28) of the objective lens (16), occur on the entire path length between the first outlet from the magnetic beam deflector (21, 22, 23, 24, 25) and from the objective lens (16).
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Hartel Peter
Preikszas Dirk
Rose Harald
Fernandez Kalimah
Lee John R.
Leo Elektronenmikroskopie GmbH
Ottesen Walter
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