Particle beam device with a particle source to be operated...

Details Particle beam device with a particle source to be operated... Particle beam device with a particle source to be operated...

2005-03-29

2005-03-29

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S289000

Reexamination Certificate

active

06872956

ABSTRACT:
A cascade type pump arrangement for a particle beam device has first and second turbomolecular pumps, wherein an outlet of the second turbomolecular pump is forepumped by an intermediate pressure region situated between a main pump port and an outlet of the first turbomolecular pump. The particle beam device has a particle beam source operated in ultra high vacuum and a specimen chamber operated at pressures from high vacuum at least up to 1 hPa.

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EPO Application 09256455 (Patent Abstracts of Japan) dated Sep. 22, 1997—Masubiro (Abstract in English).

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