Particle beam apparatus for low-error imaging of line-shaped sub

Details Particle beam apparatus for low-error imaging of line-shaped sub Particle beam apparatus for low-error imaging of line-shaped sub

1987-06-25

1989-08-01

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, 250398, H01J 314

Patent

active

048535451

ABSTRACT:
An improved particle beam apparatus for imaging line-shaped subjects onto an image surface, for example, a row of perforations of an aperture diaphragm on a surface of a semiconductor member to be structured characterized by the isotropic and anisotropic distortions being compensated by the insertion of a first multi-pole optics into the beam path under the subject. Astigmatisms produced by the first multi-pole optics are compensated by a second multi-pole optic that is inserted in the beam path immediately above the imaging lens.

REFERENCES:
patent: 2919381 (1959-12-01), Glaser
patent: 3753034 (1973-08-01), Spicer
patent: 4362942 (1982-12-01), Yasuda
patent: 4389571 (1983-06-01), Crewe
patent: 4414474 (1983-11-01), Crewe
patent: 4469950 (1984-09-01), Taylor et al.
patent: 4472636 (1984-09-01), Hahn
patent: 4514638 (1985-04-01), Lischke et al.
patent: 4724328 (1988-02-01), Lischke

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