Partially constrained minimum energy state controller

Details Partially constrained minimum energy state controller Partially constrained minimum energy state controller

1990-05-21

1992-11-17

Howell, Janice A.

X-ray or gamma ray systems or devices

Specific application

Lithography

378160, 378205, 25044211, 318128, 36447435, 364508, G21K 500

Patent

active

051650940

ABSTRACT:
A lithographic system, having a stepper and exposure station built on a block of granite attached to the ground using isolation legs, includes a servo control system for providing signals a motor associated with the stepper to control the movement of the stepper. The control system includes means to calculate a filter formula used to generate the control signals, which formula is calculated in response to the initial velocity, the movement of the stepper and a certain time between discrete movements, so that a minimum amount of energy is utilized. The filter formula requires that the difference in the velocity of the base and the stepper be zero at the time the stepper reaches the final position. Where time is short, both the base and the stepper initially move with the same velocity and end with the same velocity, and an array processor calculates the time varying filter formula.

REFERENCES:
patent: 4514858 (1985-04-01), Novak
patent: 4539695 (1985-09-01), La Fiandra
patent: 4644172 (1987-02-01), Sandland et al.
patent: 4782236 (1988-11-01), Chitayat
patent: 4929874 (1990-05-01), Minzuno et al.
patent: 4956789 (1990-09-01), Hamada et al.
patent: 4969169 (1990-11-01), Forsyth et al.

Affiliated with

Also associated with

Rating

Partially constrained minimum energy state controller does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Partially constrained minimum energy state controller, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Partially constrained minimum energy state controller will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1179166