Parallelizing gauge in a wedge error correction head

Details Parallelizing gauge in a wedge error correction head Parallelizing gauge in a wedge error correction head

1977-01-21

1979-01-30

Aegerter, Richard E.

Geometrical instruments

Area integrators

Electrical

355 79, G03B 2702

Patent

active

041364597

ABSTRACT:
A parallelizing gauge in a wedge error correction head for the parallel adjustment of a substrate plate to the plane of a light exposing mask, with a means being provided for introducing and removing substrate plates and masks into and/or out of the intermediate space between the light source and the substrate support. At least three foil segments are provided, each being distributed over the circumference of the wedge error correction head and extending radially inwardly, and each being controllably movable in a radial direction.

REFERENCES:
patent: 1411351 (1922-04-01), Hart
patent: 1818167 (1931-08-01), Sears et al.
patent: 2906205 (1959-10-01), Furman et al.
patent: 3858978 (1975-01-01), Johannsmeier
patent: 3988865 (1976-11-01), Weisman

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