Parallel plane holding mechanism and apparatus using such a mech

Details Parallel plane holding mechanism and apparatus using such a mech Parallel plane holding mechanism and apparatus using such a mech

1995-03-20

1996-09-10

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250306, 310309, 369126, H01J 3728

Patent

active

055548512

ABSTRACT:
A parallel plane holding mechanism is constructed as follows. Beams are provided on the peripheral portion of a flat plate-shaped weight member. A base plate is provided so as to face the weight member. First and second electrodes are provided on both surfaces of the weight member and the base plate to face each other. A voltage is applied between the first electrode and the second electrode so that the distance between the weight member and the base plate is controlled to move the weight member to thereby hold a reference surface of the weight member to be parallel to a predetermined reference surface.

REFERENCES:
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4668865 (1987-05-01), Grimzewski et al.
patent: 4806755 (1989-02-01), Duerig et al.
patent: 4831614 (1989-05-01), Duerig et al.
patent: 4998016 (1991-03-01), Nose et al.
patent: 5006487 (1991-04-01), Stokes
patent: 5051643 (1991-09-01), Dworsky et al.
patent: 5075548 (1991-12-01), Kajimura

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