Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2005-02-01
2005-02-01
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C137S486000, C700S282000
Reexamination Certificate
active
06848470
ABSTRACT:
A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
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Dohi Ryousuke
Fukazawa Kazuo
Hirose Jun
Hirose Takashi
Ideta Eiji
Fujikin Incorporated
Griffin & Szipl, P.C.
Krishnamurthy Ramesh
Ohmi Tadahiro
Tokyo Electron Ltd.
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