Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2007-10-30
2009-10-06
Rachuba, Maurina (Department: 3727)
Abrading
Abrading process
With tool treating or forming
C451S443000
Reexamination Certificate
active
07597608
ABSTRACT:
A method and apparatus for conditioning is provided. In one embodiment, a conditioning disk includes a plurality of conditioning elements each having an abrasive working surface, and a flexible foundation having the conditioning elements coupled thereto. The flexible foundation has physical properties that retain the working surfaces in a substantially coplanar orientation with respect to the pad surface.
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Chang Shou-Sung
Zuniga Steven M.
Applied Materials Inc.
Patterson & Sheridan LLP
Rachuba Maurina
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