Pad conditioner test apparatus and method

Details Pad conditioner test apparatus and method Pad conditioner test apparatus and method

2006-06-06

2006-06-06

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S008000, C451S011000

Reexamination Certificate

active

07056190

ABSTRACT:
A test apparatus and method tests a pad conditioner of a chemical mechanical polishing apparatus. The pad conditioner test apparatus includes a main body having a conditioner mounting section that supports the pad conditioner, a conditioner head raising/lowering system that raises and lowers the head of the pad conditioner while the pad conditioner is supported on the test apparatus, and a discrimination section that detects the ability of the head to be raised/lowered in accordance with a program so that the condition of the head can be determined. The test apparatus can prevent various problems that otherwise would occur if a new pad conditioner were directly installed in the chemical mechanical polishing apparatus.

REFERENCES:
patent: 6695680 (2004-02-01), Choi et al.
patent: 6722948 (2004-04-01), Berman
patent: 2004/0089070 (2004-05-01), Elledge
patent: 2001-129754 (2001-05-01), None
patent: 1020030004491 (2003-01-01), None

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