Pad characterization tool

Details Pad characterization tool Pad characterization tool

2006-11-02

2008-08-05

Morgan, Eileen P. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S008000, C451S021000, C451S041000, C451S285000, C156S345280, C205S645000

Reexamination Certificate

active

07407433

ABSTRACT:
Tools and methods for in-situ characterizing of a surface of a polishing pad are described. A characterization tool is integrated with polishing tool so that the polishing pad can be monitored in-situ. The characterization tool and the polishing pad can be rotated or moved so that any portion of the polishing pad can be tested.

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