Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2008-03-18
2008-03-18
Thomas, David B (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S527000, C204S22400M, C205S663000
Reexamination Certificate
active
11458356
ABSTRACT:
Embodiments of a processing pad assembly for processing a substrate are provided. The processing pad assembly includes an upper layer having a processing surface and an electrode having a top side coupled to the upper layer and a bottom side opposite the top side. A first set of holes is formed through the upper layer for exposing the electrode to the processing surface. At least one aperture is formed through the upper layer and the electrode.
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Chang Shou-Sung
Chen Liang-Yuh
Hu Yongqi
Liu Feng Q.
Tsai Stan D.
Applied Materials Inc.
Patterson & Sheridan LLP
Thomas David B
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