Optical waveguides – With optical coupler
Reexamination Certificate
1999-08-03
2001-02-13
Font, Frank G. (Department: 2877)
Optical waveguides
With optical coupler
C385S047000, C385S134000
Reexamination Certificate
active
06188814
ABSTRACT:
TECHNICAL FIELD
This invention relates generally to the field of microelectromechanical devices and systems and in particular to packaging of microelectromechanical devices and systems for communication, telemetry, and information processing.
BACKGROUND OF THE INVENTION
Microelectromechanical devices have become increasingly used for applications for which no comparable non-mechanical electronic device is available. Even for switching applications for optical communication, telemetry, and information processing systems, for which non-mechanical electronic devices do exist, a need for augmented capabilities is frequently met by microelectromechanical devices.
Nevertheless, as increasing numbers of devices are fit into ever-smaller spaces, optical microelectromechanical devices (hereinafter, “MEMS”) become impaired by dust, smoke, and moisture condensation in spaces that must be kept optically free. Impairment occurs when design standards fail to be met. For example, for a telephone central office application, design standards like Telcordia's Network Equipment Building Systems standards need to be met. These standards are intolerant of any dust, smoke, or moisture condensation in the free spaces of optical switches. The technical and economic consequences of failures to meet such standards increase markedly as the size of an optical switching array grows. Thus, a need exists for avoiding the effects of dust, smoke, and moisture condensation in optical switching arrays. It is anticipated that this need extends to other MEMS devices and systems.
SUMMARY OF THE INVENTION
According to the invention, a packaged microelectromechanical device having a housing with a plurality of ports for a number of different optical elements is hermetically sealed. In a preferred embodiment, the different optical elements at the plurality of ports include a bundle of optical fibers and an array of MEMS steerable mirrors.
According to a feature of the invention, a hermetic seal of the housing is facilitated by a conduit arrangement for evacuating the housing and pressurizing it with an inert atmosphere. In the preferred embodiment, two conduits are used, one for evacuating the housing and another for pressurizing it with an inert atmosphere, which remains in the completed device. At each port the respective optical element is secured to the housing by a flange that is welded or brazed.
Other features and advantages of the present invention will become apparent from the following description.
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Font Frank G.
Lucent Technologies - Inc.
Nguyen Sang H.
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