Oxime sulfonates and the use thereof as latent sulfonic acids

Details Oxime sulfonates and the use thereof as latent sulfonic acids Oxime sulfonates and the use thereof as latent sulfonic acids

1998-06-25

1999-12-21

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

4302701, 430913, 430916, 430919, 430921, 564253, 549 75, 549 68, 558408, 546294, 548556, G03C 1725, G03C 172, G07C24904, G07C25132

Patent

active

060047240

ABSTRACT:
New oximsulfonate compounds of the formulae I or II, ##STR1## wherein m is 0 or 1; x is 1 or 2; R.sub.1 is, for example phenyl, which is unsubstituted or substituted or R.sub.1 is a heteroaryl radical that is unsubstituted or substituted, or, if m is 0, R.sub.1 additionally is C.sub.2 -C.sub.6 alkoxycarbonyl, phenoxycarbonyl or CN; R'.sub.1 is for example C.sub.2 -C.sub.12 alkylene, phenylene; R.sub.2 has for example one of the meanings of R.sub.1 ; n is 1 or 2; R.sub.3 is for example C.sub.1 -C.sub.18 alkyl, R'.sub.3 when x is 1, has one of the meanings given for R.sub.3, or R'.sub.3 in the formula IV and when x is 2 in the formula 1, is for example C.sub.2 -C.sub.12 alkylene, phenylene; R.sub.4 and R.sub.5 are independently of each other for example hydrogen, halogen, C.sub.1 -C.sub.6 alkyl; R.sub.6 is for example hydrogen, phenyl; R.sub.7 and R.sub.8 are independently of each other for example hydrogen or C.sub.1 -C.sub.12 -alkyl; R.sub.9 is for example C.sub.1 -C.sub.12 alkyl; A is S, O, NR.sub.6, or a group of formula A1, A2, A3 or A4 ##STR2## R.sub.10 and R.sub.11 independently of each other have one of the meanings given for R.sub.4 ; R.sub.12, R.sub.13, R.sub.14 and R.sub.15 independently of one another are for example hydrogen, C.sub.1 -C.sub.4 alkyl; Z is CR.sub.11 or N; Z.sub.1 is --CH.sub.2 --, S, O or NR.sub.6, are useful as latent sulfonic acids, especially in photoresist applications.

REFERENCES:
patent: 4540598 (1985-09-01), Berner et al.
patent: 4736055 (1988-04-01), Dietliker et al.
Derwent Abstract 93-370703/47 for European Patent 0571330.

Affiliated with

Also associated with

Rating

Oxime sulfonates and the use thereof as latent sulfonic acids does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Oxime sulfonates and the use thereof as latent sulfonic acids, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Oxime sulfonates and the use thereof as latent sulfonic acids will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-503387