Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1986-06-20
1987-09-01
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156653, 156656, 156657, 156662, 437237, 437 41, 437200, H01L 21306, B44C 122, C03C 1500, C23F 102
Patent
active
046907300
ABSTRACT:
A cap oxide (or oxide
itride) prevents silicon outdiffusion during the reaction step which forms direct-react titanium silicide.
REFERENCES:
patent: 4593454 (1986-06-01), Baudrant et al.
patent: 4617723 (1986-10-01), Mukai
patent: 4635347 (1987-01-01), Lien et al.
Bell David A.
Haken Roger A.
Holloway Thomas C.
Tang Thomas E.
Wei Che-Chia
Heiting Leo N.
Powell William A.
Sharp Melvin
Sorensen Douglas A.
Texas Instruments Incorporated
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