Oxidation-resistant conducting perovskites

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S213000, C257S288000, C257SE21009, C438S003000

Reexamination Certificate

active

07095067

ABSTRACT:
The present invention provides a semicondctor device that includes a conductor comprised of first and second layers of perovskite that have different stoichiometric compositions. The conductors provide a good template for the formation of dielectric layers thereon and are resistant to oxidizing environments used in semiconductor processing.

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A. Ohtomo, D.A. Muller, J.L. Grazul & H.Y. Hwang; “Artificial Charge-Modulationin Atomic-Scale Perovskite Titanate Superlattices”; Letter to Nature; Nature 419, Sep. 26, 2002; pp. 378-380.

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