Overlay vernier

Details Overlay vernier Overlay vernier

2005-10-11

2005-10-11

Gutierrez, Diego (Department: 2859)

Geometrical instruments

Gauge

Collocating

C033S613000, C414S935000

Reexamination Certificate

active

06952886

ABSTRACT:
The present invention provides a new and improved overlay vernier that can increase the overlay measurement accuracy. The overlay vernier of the present invention comprises an inner square vernier and an outer square vernier. The outer vernier comprises a central square opening and four trapezoid-shaped openings surrounding the central square opening.

REFERENCES:
patent: 6357131 (2002-03-01), Cheng et al.
patent: 6536130 (2003-03-01), Wu et al.
patent: 6571485 (2003-06-01), Yu et al.
patent: 2003/0101610 (2003-06-01), Yu et al.

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