Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-02-20
2007-02-20
Bali, Vikkram (Department: 2623)
Image analysis
Applications
Manufacturing or product inspection
C382S143000, C382S145000
Reexamination Certificate
active
10186324
ABSTRACT:
An overlay mark for determining the relative position between two or more successive layers of a substrate or between two or more separately generated patterns on a single layer of a substrate is disclosed. The overlay mark includes a plurality of working zones, which are used to calculate alignment between a first and a second layer of the substrate or between a first and a second pattern on a single layer of the substrate. Each of the working zones is positioned within the perimeter of the mark. Each of the working zones represents a different area of the mark. The working zones are configured to substantially fill the perimeter of the mark such that the combined area of the working zones is substantially equal to the total area of the mark.
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Adel Michael
Ghinovker Mark
Levy Ady
Mieher Walter Dean
Wack Dan
Bali Vikkram
Beyer Weaver & Thomas LLP
KLA-Tencor Technologies Corporation
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