Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2005-07-26
2005-07-26
Zarabian, Amir (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C257S797000, C257S618000, C438S975000
Reexamination Certificate
active
06921916
ABSTRACT:
An overlay mark for determining the relative position between two or more successive layers of a substrate or between two or more separately generated patterns on a single layer of a substrate is disclosed. The overlay mark includes a plurality of coarsely segmented lines that are formed by a plurality of finely segmented bars. In some cases, the coarsely segmented lines also include at least one dark field while being separated by a plurality of finely segmented bars and at least one clear field. In other cases, the coarsely segmented lines are positioned into at least two groups. The first group of coarsely segmented lines, which are separated by clear fields, are formed by a plurality of finely segmented bars. The second group of coarsely segmented lines, which are separated by dark fields, are also formed by a plurality of finely segmented bars.
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Adel Michael
Ghinovker Mark
Beyer Weaver & Thomas LLP
KLA -Tenocor Technologies Corporation
Novacek Christy
Zarabian Amir
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