Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate
2004-01-26
2009-11-03
Fox, Charles A (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
C198S678100
Reexamination Certificate
active
07611318
ABSTRACT:
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
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Elliott Martin R.
Englhardt Eric A.
Hudgens Jeffrey C.
Lowrance Robert B.
Rice Michael R.
Applied Materials Inc.
Dugan & Dugan PC
Fox Charles A
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