Outgassing rate detection

Details Outgassing rate detection Outgassing rate detection

2007-09-25

2009-11-10

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07615748

ABSTRACT:
A workpiece processing system includes a platen configured to support a workpiece, a source configured to provide an electromagnetic wave proximate a front surface of the workpiece, and a detector. The detector is configured to receive at least a portion of the electromagnetic wave and provide a detection signal representative of an outgassing rate from the workpiece of outgassing byproducts. A method of detecting an outgassing rate is also provided. The method includes providing an electromagnetic wave proximate a front surface of a workpiece, receiving at least a portion of the electromagnetic wave, and providing a detection signal representative of an outgassing rate from the workpiece of outgassing byproducts.

REFERENCES:
patent: 6323497 (2001-11-01), Walther
patent: 2002/0030801 (2002-03-01), Endo et al.
patent: 2002/0134934 (2002-09-01), Haney et al.
patent: 2003/0230732 (2003-12-01), Sasaki
patent: 2005/0260837 (2005-11-01), Walther
patent: 2006/0131514 (2006-06-01), Anc et al.
patent: 2004047893 (2004-02-01), None

Affiliated with

Also associated with

Rating

Outgassing rate detection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Outgassing rate detection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Outgassing rate detection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4052941