Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
Reexamination Certificate
2005-09-27
2005-09-27
Nghiem, Michael (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Orientation or position
C118S715000
Reexamination Certificate
active
06950774
ABSTRACT:
An optical substrate placement device is disclosed employing light from the surface of a rotating substrate in order to generate a signal component which oscillates at the frequency of rotation of the substrate. The magnitude of another signal resulting from filtering the signal component at the frequency of rotation, when processed, reveals whether the substrate is misplaced or “out-of-pocket.” Preferred embodiments employ reactor heat lamps as the light source. Methods of detecting whether a substrate is misplaced are also provided.
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ASM America Inc.
Knobbe Martens Olson & Bear LLP
Nghiem Michael
Sun Xiuqin
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