Out-of-plane sensing device

Details Out-of-plane sensing device Out-of-plane sensing device

2007-11-21

2010-12-14

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514380

Reexamination Certificate

active

07849742

ABSTRACT:
An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the proof mass to make the proof mass move back to its equilibrium position when the proof mass moves perpendicularly to the substrate. An electrode extends from the proof mass toward the frame. A counter electrode extends from the frame toward the proof mass, wherein the projection of the electrode onto the substrate overlaps with that of the counter electrode onto the substrate.

REFERENCES:
patent: 5939633 (1999-08-01), Judy
patent: 6082197 (2000-07-01), Mizuno et al.
patent: 6122964 (2000-09-01), Mohaupt et al.
patent: 6223598 (2001-05-01), Judy
patent: 6508125 (2003-01-01), Otani
patent: 6662654 (2003-12-01), Miao et al.
patent: 6892576 (2005-05-01), Samuels et al.
patent: 6906849 (2005-06-01), Mi et al.
patent: 6915693 (2005-07-01), Kim et al.
patent: 6936492 (2005-08-01), McNeil et al.
patent: 6990864 (2006-01-01), Sakai
patent: 7258012 (2007-08-01), Xie
patent: 7355318 (2008-04-01), Dean et al.
patent: 7412887 (2008-08-01), Memishian
patent: 7600428 (2009-10-01), Robert et al.
Chuanwei Wang, “A novel CMOS out-of -plane accelerometer with fully differential gap-closing capacitance sensing electrodes”, Journal of Micromechanics and Microengineering, pp. 1-6, 2007.

Affiliated with

Also associated with

Rating

Out-of-plane sensing device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Out-of-plane sensing device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Out-of-plane sensing device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4163716