Oscillating quartz atomic force microscope

Details Oscillating quartz atomic force microscope Oscillating quartz atomic force microscope

1988-03-07

1989-07-25

Eisenzopf, Reinhard J.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250423F, G01N 2300, H01J 3726

Patent

active

048516716

ABSTRACT:
This atomic force microscope includes a pointed tip (1) mounted on top of an oscillating crystal (2) which is translatable in xyz-directions by a conventional xyz-drive (4). A potential applied to a pair of electrodes (5, 6) coated on opposite faces of the crystal (2) causes the latter to oscillate with its resonance frequency. As the tip (1) is approached to a surface to be investigated, the frequency of oscillation of the crystal deviates from its original frequency. This deviation can be used in a feedback loop to control the distance in z-direction of the tip (1) from the surface being investigated and to plot an image of the contour of each scan performed by the tip (1) across the surface.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4550257 (1985-10-01), Binnig et al.
patent: 4618767 (1986-10-01), Smith et al.
patent: 4724318 (1988-02-01), Binnig

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