Orientation filtering for crystalline films

Details Orientation filtering for crystalline films Orientation filtering for crystalline films

1983-03-31

1986-12-30

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG111, 156DIG65, 156DIG88, C30B 1306

Patent

active

046327231

ABSTRACT:
A substrate is coated with a film to be recrystallized. A pattern of crystallization barriers is created in the film, for example, by etching voids in the film. An encapsulation layer is generally applied to protect the film, fill the voids and otherwise enhance a recrystallization process. Recrystallization is carried out such that certain orientations pass preferentially through the barrier, generally as a result of growth-velocity anisotropy. The result is a film of a specific predetermined crystallographic orientation, a range of orientations or a set of discrete orientations.

REFERENCES:
patent: 4333792 (1982-06-01), Smith
patent: 4479846 (1984-10-01), Smith et al.
Geis et al., Appl. Phys. Lett. 37(5) 9/80, pp. 454-456.

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