Organometallic lead precursor, in-situ synthesis thereof, lead-t

Details Organometallic lead precursor, in-situ synthesis thereof, lead-t Organometallic lead precursor, in-situ synthesis thereof, lead-t

1996-10-10

1997-11-18

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

501134, C07F 724, C04B 3546

Patent

active

056889801

ABSTRACT:
An organometallic lead precursor, represented by following formula:
wherein L is an electron donor ligand selected from the group consisting of NR.sub.3 (R=H, CH.sub.3) gas and Cl.sub.2 gas; THD denotes 2,2',6,6'-tetramethyl-3,5-heptanedione; and x is in the range of 0.5 to 2, is prepared by flowing a gas phase electron donor into a bubbler containing bis (2,2',6,6'-tetramethyl-3,5-heptanedione)Pb at a predetermined temperature, to synthesize, in-situ, an adduct. The precursor exhibits a remarkable improvement in volatility and in stability at the vaporization point.
Lead-titanium based thin films prepared from the precursor, display superior reproducibility and reliability.

REFERENCES:
patent: 5139999 (1992-08-01), Gordon et al.
patent: 5372850 (1994-12-01), Uchikawa et al.
patent: 5431958 (1995-07-01), Desu et al.

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