Organometallic compounds

Details Organometallic compounds Organometallic compounds

1987-09-15

1989-11-14

Straub, Gary P.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156613, 156DIG61, 156DIG70, 427252, 4272552, C30B 2500, C30B 2940, C30B 2942, C23C 1600

Patent

active

048804924

ABSTRACT:
In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.

REFERENCES:
patent: 3154828 (1964-10-01), Kottewhaln
patent: 4247359 (1981-01-01), Venkatssetty
patent: 4509997 (1985-04-01), Cockayne et al.
patent: 4702791 (1987-10-01), Mirura et al.
patent: 4734387 (1988-03-01), Nelson et al.
Jastrzebski et al., Intramolecular IN-IW Coordination, Organometallics 1982 (1) pp. 1492-1495.
Ludowise, M. J., Metalorganic Chemical Vapor Depositione of III-V Semiconductors, Applied Phys 58 (8) 15 Oct., 85 pp. R31-R53.
Webb et al., "Deposition of Indium Antimonide," Appl Phys Letter 47(8), 15 Oct. 85, pp. 831-833.

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