Organometallic compounds

Details Organometallic compounds Organometallic compounds

2006-10-04

2009-06-16

Gonzalez, Porfirio Nazario (Department: 1621)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C106S001250, C427S248100, C438S681000, C556S018000, C556S020000, C564S015000

Reexamination Certificate

active

07547631

ABSTRACT:
Organometallic compounds containing a phosphoamidinate ligand are provided. Such compounds are particularly suitable for use as vapor deposition precursors. Also provided are methods of depositing thin films, such as by ALD and CVD, using such compounds.

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