Organic-metal precursor material and method of manufacturing...

Details Organic-metal precursor material and method of manufacturing... Organic-metal precursor material and method of manufacturing...

2009-09-08

2010-11-16

Gonzalez, Porfirio Nazario (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

Reexamination Certificate

active

07834206

ABSTRACT:
Provided are an organic-metal precursor material that can be readily decomposed without reacting with an oxidant, a method of manufacturing a metal thin film using the organic-metal precursor material, and a metal thin film prepared using the organic-metal precursor material. The organic-metal precursor material is an organic molecule having lone-pair electrons selected from the group consisting of ether, amine, tetrahydrofuran (THF), a phosphine group, and a phosphite group, and has a structure of covalent coordination bond.

REFERENCES:
patent: 2002/0074582 (2002-06-01), Hiratani et al.
patent: 2005/0085031 (2005-04-01), Lopatin et al.

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