Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate
2005-04-12
2005-04-12
Lund, Jeffrie R. (Department: 1763)
Coating apparatus
Gas or vapor deposition
Having means to expose a portion of a substrate to coating...
C118S721000, C118S504000, C118S505000
Reexamination Certificate
active
06878209
ABSTRACT:
A method for producing an organic electroluminescent device, which is provided with first electrodes formed on a substrate, a thin film layer formed on the first electrode containing at least an emitting layer composed of an organic compound and a plurality of second electrodes formed on the thin film layer, and has a plurality of luminescent regions on said substrate, comprising the steps of forming spacers having a height at least partially exceeding the thickness of said thin film layer on the substrate, and vapor-depositing a deposit for patterning while the shadow mask having reinforcing lines formed across its apertures is kept in contact with said spacers.Highly precise fine patterning can be effected under wide vapor deposition conditions without degrading the properties of organic electroluminescent elements, and high stability can be achieved by a relatively simple process without limiting the structure of the electroluminescent device.
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Fujimori Shigeo
Himeshima Yoshio
Kohama Akira
Lund Jeffrie R.
Morrison & Foerster / LLP
Toray Industries Inc.
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