Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-07-19
2008-12-30
Walke, Amanda C. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C528S036000
Reexamination Certificate
active
07470500
ABSTRACT:
The present invention relates to bottom antireflective coating compositions, polymers useful in making such compositions, and their use in image processing by forming a thin layer between a reflective substrate and a photoresist coating.
REFERENCES:
patent: 2901467 (1959-08-01), Croco
patent: 4536468 (1985-08-01), Yasui et al.
patent: 4581321 (1986-04-01), Stahlhofen
patent: 4889789 (1989-12-01), Stahlhofen
patent: 6100308 (2000-08-01), Guettes et al.
patent: 6133399 (2000-10-01), Smith et al.
patent: 6852421 (2005-02-01), Wayton et al.
patent: 7084207 (2006-08-01), Yamana et al.
patent: 7144969 (2006-12-01), McDonald
patent: 7217491 (2007-05-01), McGinniss et al.
patent: 2004/0023156 (2004-02-01), McGinness et al.
patent: 1 204 547 (1986-05-01), None
patent: 36 34 371 (1988-04-01), None
patent: 0 676 428 (1995-10-01), None
patent: 1221798 (1971-02-01), None
patent: 1-293339 (1989-11-01), None
patent: WO 02/24777 (2002-03-01), None
Tsai etal., “Physical Properties of Crosslinked Polyurethanes”, Polymer International 47 (1998) pp. 445-450.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration (Form PCT/ISA/220); International Search Report (Form PCT/ISA/210); and Written Opinion of the International Searching Authority (Form PCT/ISA/237) for PCT/IB2006/002041.
English Language Abstract of JP 1-293339 A.
English language abstract of EP 0 263 434 (corresponding to DE 36 34 371 A1).
Notification Concerning Transmittal of Copy of International Preliminary Report on Patentability (Chapter I of the Patent Cooperation Treaty) (Form PCT/IB/326), the International Preliminary Report on Patentability (Form PCT/ISA/373), and the Written Opinion of the International Searching Authority (Form PCT/ISA/237) for PCT/IB2006/002041.
Ding-Lee Shuji S.
Yao Huirong
AZ Electronic Materials USA Corp.
Kass Alan P.
Walke Amanda C.
LandOfFree
Organic bottom antireflective polymer compositions does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Organic bottom antireflective polymer compositions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Organic bottom antireflective polymer compositions will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4050912