Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-01-25
2005-01-25
Ashton, Rosemary (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S905000, C525S523000
Reexamination Certificate
active
06846612
ABSTRACT:
New polymers and new anti-reflective compositions containing such polymers are provided. The compositions comprise a polymer (e.g., epoxy cresol novolac resins) bonded with a chromophore (4-hydroxybenzoic acid, trimellitic anhydride). The inventive compositions can be applied to substrates (e.g., silicon wafers) to form anti-reflective coating layers having high etch rates which minimize or prevent reflection during subsequent photoresist exposure and developing.
REFERENCES:
patent: 3635889 (1972-01-01), Bowen
patent: 6110653 (2000-08-01), Holmes et al.
patent: 6132935 (2000-10-01), Kobayashi et al.
patent: 6495305 (2002-12-01), Enomoto et al.
patent: 20030004283 (2003-01-01), Puligadda et al.
patent: 1931452 (1970-01-01), None
patent: 19520625 (1995-12-01), None
patent: 11-102071 (1999-04-01), None
patent: 2001-147538 (2001-05-01), None
Nakano, T., et a., “Positive-Type Photopolyimide Based on Vinyl Ether Crosslinking and De-Crosslinking,”J. Photopolym. Sci. Technol., vol. 13, No. 5, 2000.
Noppakundilograt, S., et al., “Visible Light-Sensitive Positive-Working Photopolymer Based on Poly(p-hydroxystyrene) and Vinyl Ether Crosslinker,”J. Photopolym. Sci. Technol., vol. 13, No. 5, 2000.
Ashton Rosemary
Brewer Science Inc.
Hovey & Williams, LLP
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