Cleaning and liquid contact with solids – Processes – With treating fluid motion
Patent
1998-02-09
1999-06-29
Warden, Jill
Cleaning and liquid contact with solids
Processes
With treating fluid motion
134 11, B08B 304
Patent
active
059163747
ABSTRACT:
A cleaning method and related apparatus for cleaning semiconductor screening masks using an aqueous alkali detergent solution applied under high pressure simultaneously from both sides of the mask, followed by a drying step that uses air knives to blow off the mask surface any residual cleaner solution.
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Casey Jon A.
Cropp Michael E.
DiAngelo Donald W.
Harmuth John F.
Knickerbocker John U.
International Business Machines - Corporation
Townsend Tiffany L.
Warden Jill
Wilkins Yolanda E.
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