Radiant energy – Inspection of solids or liquids by charged particles
Patent
1993-04-28
1995-06-20
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3700
Patent
active
054263026
ABSTRACT:
A large-nanostructure probe with optically guided macroscopic scanning is disclosed for high-resolution imaging and characterization of nanostructures. The invention contemplates the use of a course positioning system, which comprises one or more quadratic index fiber optic lenses in conjunction with an optical microscope. A magnifying probe is placed in close proximity to a sample under inspection. The fiber optic lenses of the coarse positioning system are used to noninvasively carry the image of a sample-to-probe junction to the optical microscope. The optical microscope further magnifies the image, allowing for precise positioning of the probe tip to within 1 .mu.m of a desired feature on the sample surface. For ease of viewing, the magnified image from the microscope may be displayed on a monitor using a charge coupled device ("CCD") camera, if so desired. Also disclosed is a long-range probing system wherein the probe tip may be one of a variety of measurement or probing apparatus. For example, a particularly effective configuration of the long-range probing system is one in which the optical viewing system of the present invention serves as part of a coarse approach system for a scanning tunneling microscope probe.
REFERENCES:
patent: 4101196 (1978-07-01), Imai
patent: 4515444 (1985-05-01), Prescott et al.
patent: 4611119 (1986-09-01), Favekas et al.
patent: 4837435 (1980-06-01), Sakuhara et al.
patent: 4837445 (1989-06-01), Nishioka et al.
patent: 4874945 (1989-10-01), Ohi
patent: 4908519 (1990-03-01), Park et al.
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 4945235 (1990-07-01), Nishioka et al.
patent: 4962306 (1990-10-01), Hodgson et al.
patent: 4999494 (1991-03-01), Elings
patent: 4999495 (1991-03-01), Miyata et al.
patent: 5018865 (1991-05-01), Ferrell et al.
patent: 5041783 (1991-08-01), Ohta et al.
patent: 5083022 (1992-01-01), Miyamoto et al.
patent: 5093719 (1992-03-01), Prescott
G. Binnig and D. P. E. Smith, "Single-Tube 3-Dimensional Scanner for Scanning Tunneling Microscopy", Rev. Sci. Instrum., vol. 57, pp. 1688-1689 (Aug. 1986).
G. C. Wetsel, Jr., et al., "Calibration of Scanning Tunneling Microscope Transducers Using Optical Beam Deflection," Appl. Phys. Lett., vol. 55, pp. 528-530 (Aug. 7, 1989).
Y. Kuk and P. J. Silverman, "Scanning, Tunneling Microscope Instrumentation," Rev. Sci. Instrum., vol. 60, pp. 165-180 (Feb. 1989).
D. P. DiLella, et al., "Control Systems for Scanning Tunneling Microscope with Tube Scanners," Rev. Sci. Instrum., vol. 60, pp. 997-1002 (Jun. 1989).
G. Binnig, et al., "Atomic Force Microscope," Phys. Rev. Lett., vol. 56, pp. 930-933 (Mar. 3, 1986).
NanoScope.TM. I Scanning Tunneling Microscope Brochure (Apr., 1987).
Marchman Herschel
Wetsel Grover C.
Berman Jack I.
Beyer James
Board of Regents University of Texas
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