Optical waveguide including superstrate of niobium or silicon ox

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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350 9634, 350320, 156655, 156657, 437 5, G02B 610, H01L 2100, B44C 122

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active

047010088

ABSTRACT:
An apparatus and method is disclosed for providing an optical waveguide that is placed in the same plane as the electrodes, thereby creating a more efficient electro optic interaction that requires less voltage to induce the desired effects on the waveguide. In addition, a superstrate is used to cover the waveguide having an index of refraction slightly less than the index of refraction of the waveguide which reduces the scattering loss inherent in the waveguide.

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Hammer et al., "High-Speed Electrooptic Waveguide Grating Modulator using Epitaxial ZnO" IEEE J. of Quant. Elect. vol. QE-11, No. 4, 4/75, pp. 138-148.
Rand et al, "Silicon Oxynitride Films on Fused Silica for Optical Waveguides" Applied Optics vol. 11, No. 11, 11/72, pp. 2482-2488.

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