Optical view port for chemical mechanical planarization endpoint

Details Optical view port for chemical mechanical planarization endpoint Optical view port for chemical mechanical planarization endpoint

1999-06-11

2000-11-14

Rose, Robert A.

Abrading

Precision device or process - or with condition responsive...

By optical sensor

B24B 4900

Patent

active

06146242&

ABSTRACT:
An optical endpoint system for a CMP system with a viewport located off-center on the platen, said view port being adjustable in height so that the window of the viewport can be made flush with the top of the polishing pad.

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