Optical unit

Details Optical unit Optical unit

1997-10-08

2000-04-18

Berman, Jack

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 318

Patent

active

060518383

ABSTRACT:
An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contact with a high-resistance body having a channel therethrough for the particle beam. A further component is provided for influencing the particle beam in the region of the electrostatic lens.

REFERENCES:
patent: 4126781 (1978-11-01), Siegel
patent: 4556823 (1985-12-01), Keller et al.
patent: 4704532 (1987-11-01), Hua
patent: 4926054 (1990-05-01), Frosien
patent: 5245194 (1993-09-01), Oae et al.

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