Optical transducer systems

Details Optical transducer systems Optical transducer systems

1988-07-08

1989-09-19

Myracle, Jerry W.

Measuring and testing

Vibration

Sensing apparatus

324175, G01M 1900

Patent

active

048669873

ABSTRACT:
An optical transducer system for producing an optical output signal representative of the rotational speed of a rotary member, particularly a shaft of a gas turbine engine, comprises a conventional inductive speed probe positioned adjacent the shaft to sense the passing of the teeth of a toothed wheel secured to and rotatable with the shaft. The inductive sensor thus produces an AC output signal whose frequency is proportional to the rotational speed of the shaft, and this signal is used to excite electrostatically vibration of a cantilever beam micromachined in silicon. The vibrating beam is arranged in an optical path defined by one or more optical fibres, such that its vibrations modulate light directed along the optical path at a frequency which is again proportional to the rotational speed of the shaft.

REFERENCES:
patent: 4536708 (1985-08-01), Schneider
patent: 4547729 (1985-11-01), Adolfsson et al.
Microelectronic Engineering, vol. 3, No. 1/4, Dec. 1986, pp. 221-234.

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