Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-08-22
2009-10-20
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S521000
Reexamination Certificate
active
07605926
ABSTRACT:
A method of positioning optical elements relative to each other uses an interferometer apparatus comprising a plurality of holograms generating beams of adjustment measuring light which are incident on optical surfaces of the optical elements. Interference patterns generated by superimposing adjustment measuring light of the beams reflected from the surfaces are indicative of positioning errors of the optical elements. The beams of adjustment measuring light may comprise focused beams forming a point focus on the optical surface and beams of light which is orthogonally incident on extended portions on the optical surface.
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Arnold Ralf
Doerband Bernd
Hetzler Jochen
Schillke Frank
Carl Zeiss SMT AG
Connolly Patrick J
Townsend and Townsend / and Crew LLP
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