Optical system for detecting three-dimensional shape

Details Optical system for detecting three-dimensional shape Optical system for detecting three-dimensional shape

1989-06-02

1991-04-02

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356376, G01N 2186

Patent

active

050049291

ABSTRACT:
An optical system for detecting the shape of a three-dimensional object comprising a collimating lens for converting a laser beam to a parallel beam of light, a scanning optical system which moves the parallel beam incident on the object in a direction normal to the object thereby to scan the object with a scanning beam, a mirror which is located in the vicinity of the scanning beam at a predetermined inclination angle with respect to the object, to reflect the beam reflected by the object in a predetermined direction as a reflection beam, an image forming lens which converges the reflection beam to a point and thereby producing an image of the object, and a first optical detector located at the point at which the reflection beam is converged to detect the converged beam spot.

REFERENCES:
patent: 4553844 (1985-11-01), Nakagawa et al.
patent: 4677302 (1987-06-01), Chiu et al.
patent: 4698513 (1987-10-01), Tojo et al.
patent: 4743770 (1988-05-01), Lee
patent: 4748329 (1988-05-01), Cielo et al.
patent: 4761546 (1988-08-01), Ikari
patent: 4792695 (1988-12-01), Blandford
patent: 4796961 (1989-01-01), Yamada et al.
patent: 4796997 (1989-01-01), Svetkoff et al.
patent: 4848864 (1989-07-01), Ostertag et al.
patent: 4864123 (1989-09-01), Mizutani
"Automated Printed-Circuit-Board Inspection", Oct. 1985.

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