Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2008-01-08
2008-01-08
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C250S330000, C359S494010
Reexamination Certificate
active
07317508
ABSTRACT:
An optical system of a microlithographic exposure apparatus comprises at least one optical element (L1to L16, 15, 16, 24) having a locally varying birefringence direction distribution that is caused by stress-induced birefringence and is at least substantially rotationally symmetrical. At least one birefringent correcting element (K1, K2; K′) is made of a crystal having a location independent birefringence direction distribution that is at least substantially rotationally symmetrical. The crystal has a crystal lattice orientation that is oriented such that its birefringence direction distribution is at least substantially perpendicular to the locally varying birefringence direction distribution of the at least one optical element (L1to L16, 15, 16, 24).
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patent: 2003/0011896 (2003-01-01), Shiraishi
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Kraehmer Daniel
Ulrich Wilhelm
Carl Zeiss SMT AG
Fish & Richardson P.C.
Kim Peter B.
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