Optical system

Details Optical system Optical system

2005-06-28

2005-06-28

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S213100, C359S214100, C359S201100, C359S204200, C355S067000

Reexamination Certificate

active

06912077

ABSTRACT:
An optical system, for example a projection exposure apparatus for microlithography, has at least one optical element with an optical surface. A correction radiation device is provided that includes at least one correction radiation source for emitting correction radiation. A scanning device has at least one scanning mirror that is irradiated by the correction radiation and driven in such a way that a defined portion of the optical surface of the optical element is scanned with the correction radiation. This results in a correction of imaging characteristics of the optical element by means of heat which is supplied to the optical element by the correction radiation.

REFERENCES:
patent: 2002/0000507 (2002-01-01), Engelhardt
patent: 0 678 768 (1995-10-01), None
patent: 0 823 662 (1998-02-01), None
patent: 1 081 553 (2001-03-01), None
patent: 2-185016 (1990-07-01), None
patent: 9-82599 (1997-03-01), None

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